Qnity Electronics has installed a Surfscan SP7XP unpatterned wafer defect inspection system from KLA at its New England Manufacturing & Technology Center in Marlborough, Massachusetts, the company said on Thursday.
The system will support Qnity’s development and manufacturing of lithography materials, including the Epic photoresist family for ArF lithography and the Eon photoresist family for extreme ultraviolet (EUV) lithography, as well as underlayer materials. The equipment expands Qnity’s characterization and process control capabilities, enabling earlier identification of variation sources during materials development and integration.
This enhancement is intended to improve process qualification, monitoring, and defect characterization for semiconductor manufacturing, according to the company. The investment aligns with Qnity’s broader strategy to strengthen semiconductor innovation across its global network, providing technology solutions for chip manufacturing and electronic systems.
Julia Woertink, Qnity’s Vice President of Technology for Semiconductor Technologies, said the upgrade will help customers advance into more advanced semiconductor nodes with greater confidence and speed. James Seale, KLA’s General Manager, noted that the installation reflects a growing industry focus on characterization and process control across the semiconductor value chain.
Qnity Electronics trades under the ticker Q on the New York Stock Exchange.
